Fabrication of ZnO Nanowire Based Piezoelectric Generators and Related Structures

Charles Opoku (1) , Abhishek Singh Dahiya (1) , Christopher Oshman (1) , Frédéric Cayrel (1) , Guylaine Poulin-Vittrant (1) , Daniel Alquier (1) , Nicolas Camara (2, 3)

1 GREMAN - UMR 7347 - GREMAN (matériaux, microélectronique, acoustique et nanotechnologies)
2 IES - Institut d’Electronique et des Systèmes
3 M@CSEE - Micro électronique, Composants, Systèmes, Efficacité Energétique

Using vertically grown hydrothermal ZnO nanowires, we demonstrate the assembly of fully functional piezoelectric energy harvesters on plastics substrates. A seedless hydrothermal process is employed for the growth of single crystalline vertically orientated ZnO NWs at around 100oC. Flexible NG are assembled using ∼7 μm thick PDMS polymer matrix on a 3x3cm substrate. A representative device with an active area of 4cm2 is characterised revealing average output voltage generation of ∼22mV (±1.2) and -32mV (±0.16) in the positive and negative cycles after 3-4mm periodic deflection at 20Hz. A power density of ∼288nW/cm3 is estimated for the device. It is envisaged that such energy scavengers may find potential applications targeting self-powered systems, sensors and on-body charging of electronics.

Mots clés: Piezoelectric; Nanogenerators; Zinc oxide; Nanowires

Domaines: Electronique

Charles Opoku, Abhishek Singh Dahiya, Christopher Oshman, Frédéric Cayrel, Guylaine Poulin-Vittrant, et al.. Fabrication of ZnO Nanowire Based Piezoelectric Generators and Related Structures. Physics Procedia, 2015, 70, pp.858-862. ⟨10.1016/j.phpro.2015.08.176⟩. ⟨hal-02092564⟩