Approaching ultrathin VO 2 films on sapphire (001) substrates by biased reactive sputtering: Characteristic morphology and its effect on the infrared-light switching

Kunio Okimura , Joe Sakai (1) , Masashi Kuwahara (2) , Mustapha Zaghrioui (3) , Yoichi Uehara (4)

1 ICN2 - ICN2 - Institut Catala de Nanociencia i Nanotecnologia
2 AIST - National Institute of Advanced Industrial Science and Technology
3 GREMAN - UMR 7347 - GREMAN (matériaux, microélectronique, acoustique et nanotechnologies)
4 RIEC - Research Institute of Electrical Communication [Sendai]

Domaines: Acoustique [physics.class-ph]

Kunio Okimura, Joe Sakai, Masashi Kuwahara, Mustapha Zaghrioui, Yoichi Uehara. Approaching ultrathin VO 2 films on sapphire (001) substrates by biased reactive sputtering: Characteristic morphology and its effect on the infrared-light switching. Journal of Vacuum Science & Technology A, 2021, 39 (4), pp.043401. ⟨10.1116/6.0001023⟩. ⟨hal-03581443⟩