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Approaching ultrathin VO 2 films on sapphire (001) substrates by biased reactive sputtering: Characteristic morphology and its effect on the infrared-light switching

Kunio Okimura Joe Sakai 1 Masashi Kuwahara 2 Mustapha Zaghrioui 3 Yoichi Uehara 4 
1 ICN2 - ICN2 - Institut Catala de Nanociencia i Nanotecnologia
2 AIST - National Institute of Advanced Industrial Science and Technology [Tokyo]
3 GREMAN - UMR 7347 - GREMAN (matériaux, microélectronique, acoustique et nanotechnologies)
4 RIEC - Research Institute of Electrical Communication [Sendai]
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https://hal-univ-tours.archives-ouvertes.fr/hal-03581443
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Submitted on : Saturday, February 19, 2022 - 5:55:58 PM
Last modification on : Tuesday, September 13, 2022 - 3:35:39 PM

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Kunio Okimura, Joe Sakai, Masashi Kuwahara, Mustapha Zaghrioui, Yoichi Uehara. Approaching ultrathin VO 2 films on sapphire (001) substrates by biased reactive sputtering: Characteristic morphology and its effect on the infrared-light switching. Journal of Vacuum Science & Technology A, American Vacuum Society, 2021, 39 (4), pp.043401. ⟨10.1116/6.0001023⟩. ⟨hal-03581443⟩

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