Approaching ultrathin VO 2 films on sapphire (001) substrates by biased reactive sputtering: Characteristic morphology and its effect on the infrared-light switching - Archive ouverte HAL Access content directly
Journal Articles Journal of Vacuum Science & Technology A Year : 2021

Approaching ultrathin VO 2 films on sapphire (001) substrates by biased reactive sputtering: Characteristic morphology and its effect on the infrared-light switching

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Physics [physics] Mechanics [physics] Acoustics [physics.class-ph]

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Submitted on : Saturday, February 19, 2022-5:55:58 PM

Last modification on : Tuesday, September 13, 2022-3:35:39 PM

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hal-03581443 , version 1 (19-02-2022)

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Kunio Okimura, Joe Sakai, Masashi Kuwahara, Mustapha Zaghrioui, Yoichi Uehara. Approaching ultrathin VO 2 films on sapphire (001) substrates by biased reactive sputtering: Characteristic morphology and its effect on the infrared-light switching. Journal of Vacuum Science & Technology A, 2021, 39 (4), pp.043401. ⟨10.1116/6.0001023⟩. ⟨hal-03581443⟩

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