Silicon carbide as a new MEMS technology, Sens. Actuators A Phys, vol.82, pp.210-218, 2000. ,
Silicon carbide membranes for gas separation applications, J. Membr. Sci, vol.288, pp.290-297, 2007. ,
Silicon carbide MEMS for harsh environments, Proc. IEEE, vol.86, pp.1594-1609, 1998. ,
3C-SiC-From Electronic to MEMS Devices, Advanced Silicon Carbide Devices and Processing, p.33, 2015. ,
URL : https://hal.archives-ouvertes.fr/hal-02132700
Stress relaxation during the growth of 3C-SiC/Si thin films, Appl. Phys. Lett, vol.89, 2004. ,
Silicon carbide X-ray beam position monitors for synchrotron applications, J. Synchrotron Radiat, vol.26, pp.28-35, 2019. ,
Fabrication of thick free-standing lightlydoped n-type 4H-SiC wafers, Mater. Sci. Forum, vol.897, pp.379-382, 2017. ,
Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips to single crystal silicon wafers, Thin Solid Films, vol.517, pp.1858-1867, 2009. ,
On the Stoney Formula for a thin film/substrate system with nonuniform substrate thickness, J. Appl. Mech, vol.74, pp.1276-1281, 2007. ,
Micromachining of thin 3C-SiC films for mechanical properties investigation, MRS Proc. 2010, vol.1246, pp.3-9 ,
Determining mean and gradient residual stresses in thin films using micromachined cantilevers, J. Micromech. Microeng, vol.6, pp.301-309, 1996. ,
Raman scattering spectroscopy of residual stresses in epitaxial AlN films, Appl. Phys. Express, vol.4, pp.10-13, 2011. ,
Stress fields analysis in 3C-SiC free-standing microstructures by micro-Raman spectroscopy, Thin Solid Films, vol.522, pp.20-22, 2012. ,
Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology, J. Mater. Res, vol.19, pp.3-20, 2004. ,
Plane-strain bulge test for thin films, J. Mater. Res, vol.20, pp.2360-2370, 2005. ,
Fracture properties of silicon carbide thin films by bulge test of long rectangular membrane, J. Microelectromech. Syst, vol.17, pp.453-461, 2008. ,
Vibrational technique for stress measurement in films: I, ideal membrane behavior, J. Am. Ceram. Soc, vol.77, pp.625-635, 1994. ,
Residual stress and Young's modulus measurement of capacitive micromachined ultrasonic transducer membranes, Proc. IEEE, vol.2, pp.953-956, 2001. ,
A new bulge test technique for the determination of Young's modulus and Poisson's ratio of thin films, J. Mater. Res, vol.7, pp.3242-3249, 1992. ,
Comparison of two experimental methods for the mechanical characterization of thin or thick films from the study of micromachined circular diaphragms, Rev. Sci. Instrum, vol.83, p.55008, 2012. ,
URL : https://hal.archives-ouvertes.fr/hal-01893587
Fabrication of electrostatic-actuated single-crystalline 4H-SiC bridge structures by photoelectrochemical etching, Proc. SPIE, vol.7926, 2011. ,
Systematic study of anodic etching of highly doped N-type 4H-SiC in various HF based electrolytes, J. Electrochem. Soc, vol.160, pp.372-379, 2013. ,
URL : https://hal.archives-ouvertes.fr/hal-01810897
Room light anodic etching of highly doped n-type 4H-SiC in high-concentration HF electrolytes: Difference between C and Si crystalline faces, Nanoscale Res. Lett, vol.7, p.367, 2012. ,
URL : https://hal.archives-ouvertes.fr/hal-01810904
Mechanical behavior of thin films, Annu. Rev. Mater. Sci, vol.26, pp.431-462, 1996. ,
Die Elastischen Platten, 1925. ,
Bending of circular plates with large deflection, Trans. ASME, vol.54, pp.627-636, 1934. ,
Mechanical properties of thin films of silver, Structure and Properties of Thin Films ,
, , pp.183-192, 1959.
The In-Situ Measurement of Mechanical Properties of Multi-Layer Coatings, 1990. ,
Analysis of the accuracy of the bulge test in determining the mechanical properties of thin films, J. Mater. Res, vol.7, pp.1553-1563, 1992. ,
Verification of FEM analysis of load-deflection methods for measuring mechanical properties of thin films, Proceedings of the IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop, pp.70-73, 1990. ,
Blister test analysis methods, Mater. Res. Soc, vol.356, pp.585-590, 1995. ,
, Theory of Plate and Shells, 1969.
Formulas for Natural Frequency and Mode Shape, 1979. ,
Examination of bulge test for determining residual stress, Young's modulus, and Poisson's ratio of 3C-SiC thin films, J. Aerosp. Eng, vol.16, issue.2, pp.46-54, 2003. ,
Relating mechanical testing and microstructural features of polysilicon thin films, J. Mater. Res, vol.14, pp.688-697, 1999. ,
, Available online: www.olympus-europa.com (accessed on, 2019.
Determination of mechanical properties of PECVD silicon nitride thin films for tunable MEMS Fabry-Perot optical filters, J. Micromech. Microeng, vol.15, p.608, 2005. ,
A theory of the plastic bulging of a metal diaphragm by lateral pressure, Lond. Edinb. Dublin Philos. Mag. J. Sci, vol.41, pp.1133-1142, 1950. ,
A resonant method for determining the residual stress and elastic modulus of a thin film, Appl. Phys. Lett, vol.103, p.31603, 2013. ,
Nondegenerate normal-mode doublets in vibrating flat circular plates, Am. J. Phys, vol.72, pp.220-225, 2004. ,
Thinfilm modeling for mechanical measurements: Should membranes be used or plates?, J. Appl. Phys, vol.71, pp.4244-4248, 1992. ,
, ICP Etching of 4H-SiC Substrates. Mater. Sci. Forum, pp.825-828, 2013.