Monolithic integration of common mode filters with electrostatic discharge protection on silicon/porous silicon hybrid substrate

M. Capelle; Jérôme Billoue; J. Concord; P. Poveda; G. Gautier

Monolithic integration of common mode filters with electrostatic discharge protection on silicon/porous silicon hybrid substrate

M. Capelle ^{1, 2} Jérôme Billoue ¹ J. Concord ² P. Poveda G. Gautier ¹

1 GREMAN - UMR 7347 - GREMAN (matériaux, microélectronique, acoustique et nanotechnologies)

2 ST-TOURS - STMicroelectronics [Tours]

Document type :

Journal articles

Domain :

Physics [physics] / Mechanics [physics] / Acoustics [physics.class-ph]

Complete list of metadatas

https://hal-univ-tours.archives-ouvertes.fr/hal-02183299
Contributor : Catherine Chenu <>
Submitted on : Monday, July 15, 2019 - 11:22:36 AM
Last modification on : Tuesday, November 19, 2019 - 4:48:34 PM

Monolithic integration of common mode filters with electrostatic discharge protection on silicon/porous silicon hybrid substrate

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Monolithic integration of common mode filters with electrostatic discharge protection on silicon/porous silicon hybrid substrate

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