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Journal articles
Monolithic integration of common mode filters with electrostatic discharge protection on silicon/porous silicon hybrid substrate
Marie Capelle 1, 2
Author
Jérôme Billoue 1
Author Employer institution : GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) IdHAL : jerome-billoue ORCID : https://orcid.org/0000-0002-0034-1302
J. Concord 2
Author
P. Poveda
Author
G. Gautier 1
Author IdHAL : gael-gautier IdRef : https://www.idref.fr/069994293 ORCID : https://orcid.org/0000-0002-6854-7040
1
GREMAN - UMR 7347 - GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) (Bât. E, 20 avenue Monge, 37200 Tours - France)
- Université de Tours (60 rue du Plat d'Étain, 37020 Tours cedex 1 - France)
- INSA CVL - Institut National des Sciences Appliquées - Centre Val de Loire (88 boulevard Lahitolle, CS 60013, 18022 Bourges cedex - France)
- CNRS - Centre National de la Recherche Scientifique : UMR7347 (France)
2
ST-TOURS - STMicroelectronics [Tours] (10 rue Thalès de Milet, 37071 Tours Cedex 2 - France)
Document type :
Journal articles
Complete list of metadatas
https://hal-univ-tours.archives-ouvertes.fr/hal-02183299
Contributor : Catherine Chenu <>
Submitted on : Monday, July 15, 2019 - 11:22:36 AM
Last modification on : Thursday, April 9, 2020 - 5:58:11 PM
Contributor : Catherine Chenu <>
Submitted on : Monday, July 15, 2019 - 11:22:36 AM
Last modification on : Thursday, April 9, 2020 - 5:58:11 PM
Identifiers
- HAL Id : hal-02183299, version 1
- DOI : 10.1063/1.4866162
Collections
UNIV-TOURS | CNRS | GREMAN | INSA-GROUPE | INSA-CVL
Citation
Marie Capelle, Jérôme Billoue, J. Concord, P. Poveda, G. Gautier. Monolithic integration of common mode filters with electrostatic discharge protection on silicon/porous silicon hybrid substrate. Applied Physics Letters, American Institute of Physics, 2014, 104 (7), pp.072104. ⟨10.1063/1.4866162⟩. ⟨hal-02183299⟩
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