Monolithic integration of common mode filters with electrostatic discharge protection on silicon/porous silicon hybrid substrate

Marie Capelle; Jérôme Billoue; J. Concord; P. Poveda; G. Gautier

doi:10.1063/1.4866162

Journal articles

Monolithic integration of common mode filters with electrostatic discharge protection on silicon/porous silicon hybrid substrate

Marie Capelle ^{1, 2} Jérôme Billoue ¹ J. Concord ² P. Poveda G. Gautier ¹

1 GREMAN - UMR 7347 - GREMAN (matériaux, microélectronique, acoustique et nanotechnologies)

2 ST-TOURS - STMicroelectronics [Tours]

Document type :

Journal articles

Domain :

Physics [physics] / Mechanics [physics] / Acoustics [physics.class-ph]

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https://hal-univ-tours.archives-ouvertes.fr/hal-02183299
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Submitted on : Monday, July 15, 2019 - 11:22:36 AM
Last modification on : Friday, January 14, 2022 - 5:10:03 PM

Monolithic integration of common mode filters with electrostatic discharge protection on silicon/porous silicon hybrid substrate

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Monolithic integration of common mode filters with electrostatic discharge protection on silicon/porous silicon hybrid substrate

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