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Journal articles
Recrystallization of VO 2 films into (011)-oriented micrometer-sized grains on Al 2 O 3 (001) in biased reactive sputtering
Nurul Hanis Azhan
Author
Kunio Okimura
Author
Kohei Matsuoka
Author
Mustapha Zaghrioui 1
Mail :
Author IdHAL : mustapha-zaghrioui IdRef : https://www.idref.fr/058460683 ORCID : https://orcid.org/0000-0001-9297-0503
Joe Sakai 1
Author
1
GREMAN - UMR 7347 - GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) (Bât. E, 20 avenue Monge, 37200 Tours - France)
- Université de Tours (60 rue du Plat d'Étain, 37020 Tours cedex 1 - France)
- INSA CVL - Institut National des Sciences Appliquées - Centre Val de Loire (88 boulevard Lahitolle, CS 60013, 18022 Bourges cedex - France)
- CNRS - Centre National de la Recherche Scientifique : UMR7347 (France)
Complete list of metadatas
https://hal-univ-tours.archives-ouvertes.fr/hal-02140271
Contributor : Mustapha Zaghrioui <>
Submitted on : Monday, May 27, 2019 - 10:43:58 AM
Last modification on : Tuesday, November 19, 2019 - 4:45:12 PM
Contributor : Mustapha Zaghrioui <>
Submitted on : Monday, May 27, 2019 - 10:43:58 AM
Last modification on : Tuesday, November 19, 2019 - 4:45:12 PM
Identifiers
- HAL Id : hal-02140271, version 1
- DOI : 10.1116/1.4989669
Collections
UNIV-TOURS | CNRS | GREMAN | INSA-GROUPE | INSA-CVL
Citation
Nurul Hanis Azhan, Kunio Okimura, Kohei Matsuoka, Mustapha Zaghrioui, Joe Sakai. Recrystallization of VO 2 films into (011)-oriented micrometer-sized grains on Al 2 O 3 (001) in biased reactive sputtering. Journal of Vacuum Science and Technology A, American Vacuum Society, 2017, 35 (6), pp.061508. ⟨10.1116/1.4989669⟩. ⟨hal-02140271⟩
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