Recrystallization of VO 2 films into (011)-oriented micrometer-sized grains on Al 2 O 3 (001) in biased reactive sputtering - Archive ouverte HAL Access content directly
Journal Articles Journal of Vacuum Science & Technology A Year : 2017

Recrystallization of VO 2 films into (011)-oriented micrometer-sized grains on Al 2 O 3 (001) in biased reactive sputtering

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1
Nurul Hanis Azhan
  • Function : Author
Kunio Okimura
Kohei Matsuoka
  • Function : Author
Mustapha Zaghrioui
GREMAN (matériaux, microélectronique, acoustique et nanotechnologies)
CV
Joe Sakai
GREMAN (matériaux, microélectronique, acoustique et nanotechnologies)

Domains

Physics [physics] Condensed Matter [cond-mat] Materials Science [cond-mat.mtrl-sci] Physics [physics] Condensed Matter [cond-mat] Strongly Correlated Electrons [cond-mat.str-el]

Mustapha Zaghrioui  : Connect in order to contact the contributor

https://hal-univ-tours.archives-ouvertes.fr/hal-02140271

Submitted on : Monday, May 27, 2019-10:43:58 AM

Last modification on : Tuesday, September 13, 2022-3:35:39 PM

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hal-02140271 , version 1 (27-05-2019)

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Nurul Hanis Azhan, Kunio Okimura, Kohei Matsuoka, Mustapha Zaghrioui, Joe Sakai. Recrystallization of VO 2 films into (011)-oriented micrometer-sized grains on Al 2 O 3 (001) in biased reactive sputtering. Journal of Vacuum Science & Technology A, 2017, 35 (6), pp.061508. ⟨10.1116/1.4989669⟩. ⟨hal-02140271⟩

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