Recrystallization of VO 2 films into (011)-oriented micrometer-sized grains on Al 2 O 3 (001) in biased reactive sputtering

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https://hal-univ-tours.archives-ouvertes.fr/hal-02140271
Contributor : Mustapha Zaghrioui <>
Submitted on : Monday, May 27, 2019 - 10:43:58 AM
Last modification on : Tuesday, November 19, 2019 - 4:45:12 PM

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Nurul Hanis Azhan, Kunio Okimura, Kohei Matsuoka, Mustapha Zaghrioui, Joe Sakai. Recrystallization of VO 2 films into (011)-oriented micrometer-sized grains on Al 2 O 3 (001) in biased reactive sputtering. Journal of Vacuum Science and Technology A, American Vacuum Society, 2017, 35 (6), pp.061508. ⟨10.1116/1.4989669⟩. ⟨hal-02140271⟩

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