Recrystallization of VO 2 films into (011)-oriented micrometer-sized grains on Al 2 O 3 (001) in biased reactive sputtering - Archive ouverte HAL Access content directly
Journal Articles Journal of Vacuum Science & Technology A Year : 2017

Recrystallization of VO 2 films into (011)-oriented micrometer-sized grains on Al 2 O 3 (001) in biased reactive sputtering

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hal-02140271 , version 1 (27-05-2019)

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Nurul Hanis Azhan, Kunio Okimura, Kohei Matsuoka, Mustapha Zaghrioui, Joe Sakai. Recrystallization of VO 2 films into (011)-oriented micrometer-sized grains on Al 2 O 3 (001) in biased reactive sputtering. Journal of Vacuum Science & Technology A, 2017, 35 (6), pp.061508. ⟨10.1116/1.4989669⟩. ⟨hal-02140271⟩
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