Recrystallization of VO 2 films into (011)-oriented micrometer-sized grains on Al 2 O 3 (001) in biased reactive sputtering

Nurul Hanis Azhan; Kunio Okimura; Kohei Matsuoka; Mustapha Zaghrioui; Joe Sakai

Recrystallization of VO 2 films into (011)-oriented micrometer-sized grains on Al 2 O 3 (001) in biased reactive sputtering

Nurul Hanis Azhan Kunio Okimura Kohei Matsuoka Mustapha Zaghrioui ¹ Joe Sakai ¹

1 GREMAN - UMR 7347 - GREMAN (matériaux, microélectronique, acoustique et nanotechnologies)

Document type :

Journal articles

Domain :

Physics [physics] / Condensed Matter [cond-mat] / Materials Science [cond-mat.mtrl-sci]

Physics [physics] / Condensed Matter [cond-mat] / Strongly Correlated Electrons [cond-mat.str-el]

Complete list of metadatas

https://hal-univ-tours.archives-ouvertes.fr/hal-02140271
Contributor : Mustapha Zaghrioui <>
Submitted on : Monday, May 27, 2019 - 10:43:58 AM
Last modification on : Tuesday, May 28, 2019 - 1:30:20 AM

Recrystallization of VO 2 films into (011)-oriented micrometer-sized grains on Al 2 O 3 (001) in biased reactive sputtering

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Recrystallization of VO 2 films into (011)-oriented micrometer-sized grains on Al 2 O 3 (001) in biased reactive sputtering

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