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Journal articles
A simple non-recessed and Au-free high quality Ohmic contacts on AlGaN/GaN: The case of Ti/Al alloy
Georgio El-Zammar
1
Arnaud Yvon
2
Wahid Khalfaoui
1
Maher Nafouti
1
Frédéric Cayrel
1
Emmanuel Collard
2
Daniel Alquier
1
Frédéric Cayrel 1
Author IdHAL : frederic-cayrel IdRef : https://www.idref.fr/094927898
Emmanuel Collard 2
Author
Daniel Alquier 1
Author IdHAL : daniel-alquier IdRef : https://www.idref.fr/128188308 ORCID : https://orcid.org/0000-0003-1345-8195
1
GREMAN - UMR 7347 - GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) (Bât. E, 20 avenue Monge, 37200 Tours - France)
- Université de Tours (60 rue du Plat d'Étain, 37020 Tours cedex 1 - France)
- INSA CVL - Institut National des Sciences Appliquées - Centre Val de Loire (88 boulevard Lahitolle, CS 60013, 18022 Bourges cedex - France)
- CNRS - Centre National de la Recherche Scientifique : UMR7347 (France)
2
ST-TOURS - STMicroelectronics [Tours] (10 rue Thalès de Milet, 37071 Tours Cedex 2 - France)
Document type :
Journal articles
Complete list of metadatas
https://hal-univ-tours.archives-ouvertes.fr/hal-02140135
Contributor : Catherine Chenu <>
Submitted on : Monday, May 27, 2019 - 9:09:43 AM
Last modification on : Saturday, November 7, 2020 - 4:00:02 PM
Contributor : Catherine Chenu <>
Submitted on : Monday, May 27, 2019 - 9:09:43 AM
Last modification on : Saturday, November 7, 2020 - 4:00:02 PM
Identifiers
- HAL Id : hal-02140135, version 1
- DOI : 10.1016/j.mssp.2017.11.021
Collections
UNIV-TOURS | CNRS | GREMAN | INSA-GROUPE | INSA-CVL
Citation
Georgio El-Zammar, Arnaud Yvon, Wahid Khalfaoui, Maher Nafouti, Frédéric Cayrel, et al.. A simple non-recessed and Au-free high quality Ohmic contacts on AlGaN/GaN: The case of Ti/Al alloy. Materials Science in Semiconductor Processing, Elsevier, 2018, 78, pp.107-110. ⟨10.1016/j.mssp.2017.11.021⟩. ⟨hal-02140135⟩
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