A simple non-recessed and Au-free high quality Ohmic contacts on AlGaN/GaN: The case of Ti/Al alloy

Georgio El-Zammar 1 Arnaud Yvon 2 Wahid Khalfaoui 1 Maher Nafouti 1 Frédéric Cayrel 1 Emmanuel Collard 2 Daniel Alquier 1
1 GREMAN - UMR 7347 - GREMAN (matériaux, microélectronique, acoustique et nanotechnologies)
2 ST-TOURS - STMicroelectronics [Tours]
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https://hal-univ-tours.archives-ouvertes.fr/hal-02140135
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Submitted on : Monday, May 27, 2019 - 9:09:43 AM
Last modification on : Tuesday, May 28, 2019 - 1:30:20 AM

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Georgio El-Zammar, Arnaud Yvon, Wahid Khalfaoui, Maher Nafouti, Frédéric Cayrel, et al.. A simple non-recessed and Au-free high quality Ohmic contacts on AlGaN/GaN: The case of Ti/Al alloy. Materials Science in Semiconductor Processing, Elsevier, 2018, 78, pp.107-110. ⟨10.1016/j.mssp.2017.11.021⟩. ⟨hal-02140135⟩

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