A simple non-recessed and Au-free high quality Ohmic contacts on AlGaN/GaN: The case of Ti/Al alloy

Georgio El-Zammar (1) , Arnaud Yvon (2) , Wahid Khalfaoui (1) , Maher Nafouti (1) , Frédéric Cayrel (1) , Emmanuel Collard (2) , Daniel Alquier (1)

1 GREMAN - UMR 7347 - GREMAN (matériaux, microélectronique, acoustique et nanotechnologies)
2 ST-TOURS - STMicroelectronics [Tours]

Domains: Physics [physics]; Mechanics [physics]; Acoustics [physics.class-ph]

Georgio El-Zammar, Arnaud Yvon, Wahid Khalfaoui, Maher Nafouti, Frédéric Cayrel, et al.. A simple non-recessed and Au-free high quality Ohmic contacts on AlGaN/GaN: The case of Ti/Al alloy. Materials Science in Semiconductor Processing, 2018, 78, pp.107-110. ⟨10.1016/j.mssp.2017.11.021⟩. ⟨hal-02140135⟩