3C-SiC — From Electronic to MEMS Devices

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https://hal-univ-tours.archives-ouvertes.fr/hal-02132700
Contributor : Jean-Francois Michaud <>
Submitted on : Friday, May 17, 2019 - 2:10:32 PM
Last modification on : Saturday, May 18, 2019 - 1:31:19 AM

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  • HAL Id : hal-02132700, version 1

Citation

Jean-François Michaud, Marc Portail, Daniel Alquier. 3C-SiC — From Electronic to MEMS Devices. Advanced Silicon Carbide Devices and Processing, InTech, 2015. ⟨hal-02132700⟩

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