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3C-SiC — From Electronic to MEMS Devices

Jean-François Michaud 1 Marc Portail 2 Daniel Alquier 1
1 GREMAN - UMR 7347 - GREMAN (matériaux, microélectronique, acoustique et nanotechnologies)
2 CRHEA - Centre de recherche sur l'hétéroepitaxie et ses applications
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https://hal-univ-tours.archives-ouvertes.fr/hal-02132700
Contributor : Jean-Francois Michaud Connect in order to contact the contributor
Submitted on : Friday, May 17, 2019 - 2:10:32 PM
Last modification on : Friday, January 14, 2022 - 5:10:02 PM

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  • HAL Id : hal-02132700, version 1

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UNIV-TOURS | CNRS | GREMAN | UNIV-COTEDAZUR | INSA-GROUPE | INSA-CVL | CRHEA

Citation

Jean-François Michaud, Marc Portail, Daniel Alquier. 3C-SiC — From Electronic to MEMS Devices. Advanced Silicon Carbide Devices and Processing, InTech, 2015. ⟨hal-02132700⟩

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