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Book Sections Year : 2015

3C-SiC — From Electronic to MEMS Devices

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hal-02132700 , version 1 (17-05-2019)

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  • HAL Id : hal-02132700 , version 1

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Jean-François Michaud, Marc Portail, Daniel Alquier. 3C-SiC — From Electronic to MEMS Devices. Advanced Silicon Carbide Devices and Processing, InTech, 2015. ⟨hal-02132700⟩
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