A Silicon-Embedded Inductor Surrounded by Porous Silicon for Improved Quality Factor

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https://hal-univ-tours.archives-ouvertes.fr/hal-02010242
Contributor : Jérôme Billoué <>
Submitted on : Thursday, February 7, 2019 - 8:17:43 AM
Last modification on : Tuesday, July 9, 2019 - 3:16:13 PM

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Rongxiang Wu, Niteng Liao, Johnny Sin, Benjamin Bardet, Jérôme Billoue, et al.. A Silicon-Embedded Inductor Surrounded by Porous Silicon for Improved Quality Factor. ECS Journal of Solid State Science and Technology, 2018, 7 (6), pp.Q112-Q115. ⟨10.1149/2.0141806jss⟩. ⟨hal-02010242⟩

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