Multistep magnetron sputtering process and in-situ heat treatment to manufacture thick, fully oxidized and well crystallized YSZ films - Archive ouverte HAL Access content directly
Journal Articles Surface and Coatings Technology Year : 2018

Multistep magnetron sputtering process and in-situ heat treatment to manufacture thick, fully oxidized and well crystallized YSZ films

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hal-01857023 , version 1 (14-08-2018)

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Pierre Coddet, Amaël Caillard, Julien Vulliet, Caroline Richard, Anne-Lise Thomann. Multistep magnetron sputtering process and in-situ heat treatment to manufacture thick, fully oxidized and well crystallized YSZ films. Surface and Coatings Technology, 2018, 349, pp.133 - 143. ⟨10.1016/j.surfcoat.2018.05.065⟩. ⟨hal-01857023⟩
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