Multistep magnetron sputtering process and in-situ heat treatment to manufacture thick, fully oxidized and well crystallized YSZ films

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https://hal-univ-tours.archives-ouvertes.fr/hal-01857023
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Submitted on : Tuesday, August 14, 2018 - 8:16:21 AM
Last modification on : Wednesday, October 9, 2019 - 1:37:49 AM

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Pierre Coddet, Amaël Caillard, Julien Vulliet, Caroline Richard, Anne-Lise Thomann. Multistep magnetron sputtering process and in-situ heat treatment to manufacture thick, fully oxidized and well crystallized YSZ films. Surface and Coatings Technology, Elsevier, 2018, 349, pp.133 - 143. ⟨10.1016/j.surfcoat.2018.05.065⟩. ⟨hal-01857023⟩

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