Integration of low-loss inductors on thin porous silicon membranes

B. Bardet 1 S. Desplobain Jérôme Billoue 1 L. Ventura 1 Gaël Gautier 1
1 GREMAN - UMR 7347 - GREMAN (matériaux, microélectronique, acoustique et nanotechnologies)
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https://hal-univ-tours.archives-ouvertes.fr/hal-01771559
Contributor : Jérôme Billoué <>
Submitted on : Thursday, April 19, 2018 - 3:48:47 PM
Last modification on : Tuesday, November 19, 2019 - 4:45:30 PM

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B. Bardet, S. Desplobain, Jérôme Billoue, L. Ventura, Gaël Gautier. Integration of low-loss inductors on thin porous silicon membranes. Microelectronic Engineering, Elsevier, 2018, 194, pp.96 - 99. ⟨10.1016/j.mee.2018.03.020⟩. ⟨hal-01771559⟩

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