Integration of low-loss inductors on thin porous silicon membranes

Benjamin Bardet; S. Desplobain; Jérôme Billoue; Laurent Ventura; Gaël Gautier

doi:10.1016/j.mee.2018.03.020

Journal articles

Integration of low-loss inductors on thin porous silicon membranes

Benjamin Bardet ¹ S. Desplobain Jérôme Billoue ¹ Laurent Ventura ¹ Gaël Gautier ¹

1 GREMAN - UMR 7347 - GREMAN (matériaux, microélectronique, acoustique et nanotechnologies)

Document type :

Journal articles

Domain :

Engineering Sciences [physics] / Micro and nanotechnologies/Microelectronics

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https://hal-univ-tours.archives-ouvertes.fr/hal-01771559
Contributor : Jérôme Billoué Connect in order to contact the contributor
Submitted on : Thursday, April 19, 2018 - 3:48:47 PM
Last modification on : Friday, January 14, 2022 - 5:10:02 PM

Integration of low-loss inductors on thin porous silicon membranes

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Integration of low-loss inductors on thin porous silicon membranes

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