Integration of low-loss inductors on thin porous silicon membranes

B. Bardet; S. Desplobain; Jérôme Billoue; L. Ventura; Gaël Gautier

Integration of low-loss inductors on thin porous silicon membranes

B. Bardet ¹ S. Desplobain Jérôme Billoue ¹ L. Ventura ¹ Gaël Gautier ¹

1 GREMAN - UMR 7347 - GREMAN (matériaux, microélectronique, acoustique et nanotechnologies)

Document type :

Journal articles

Domain :

Engineering Sciences [physics] / Micro and nanotechnologies/Microelectronics

Complete list of metadatas

https://hal-univ-tours.archives-ouvertes.fr/hal-01771559
Contributor : Jérôme Billoué <>
Submitted on : Thursday, April 19, 2018 - 3:48:47 PM
Last modification on : Tuesday, July 23, 2019 - 11:16:04 AM

Integration of low-loss inductors on thin porous silicon membranes

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Integration of low-loss inductors on thin porous silicon membranes

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