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Journal Articles Microelectronic Engineering Year : 2018

Integration of low-loss inductors on thin porous silicon membranes

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hal-01771559 , version 1 (19-04-2018)

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Benjamin Bardet, S. Desplobain, Jérôme Billoue, Laurent Ventura, Gaël Gautier. Integration of low-loss inductors on thin porous silicon membranes. Microelectronic Engineering, 2018, 194, pp.96 - 99. ⟨10.1016/j.mee.2018.03.020⟩. ⟨hal-01771559⟩
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