Benjamin Bardet, S. Desplobain, Jérôme Billoue, Laurent Ventura, Gaël Gautier. Integration of low-loss inductors on thin porous silicon membranes.
Microelectronic Engineering, Elsevier, 2018, 194, pp.96 - 99.
⟨10.1016/j.mee.2018.03.020⟩.
⟨hal-01771559⟩