Integration of low-loss inductors on thin porous silicon membranes

Benjamin Bardet (1) , S. Desplobain , Jérôme Billoue (1) , Laurent Ventura (1) , Gaël Gautier (1)

1 GREMAN - UMR 7347 - GREMAN (matériaux, microélectronique, acoustique et nanotechnologies)

Domains: Engineering Sciences [physics]; Micro and nanotechnologies/Microelectronics

Benjamin Bardet, S. Desplobain, Jérôme Billoue, Laurent Ventura, Gaël Gautier. Integration of low-loss inductors on thin porous silicon membranes. Microelectronic Engineering, 2018, 194, pp.96 - 99. ⟨10.1016/j.mee.2018.03.020⟩. ⟨hal-01771559⟩