Laser irradiation influence on Si/3C-SiC/Si heterostructures for subsequent 3C-SiC membrane elaboration - Archive ouverte HAL Access content directly
Conference Papers Year : 2016

Laser irradiation influence on Si/3C-SiC/Si heterostructures for subsequent 3C-SiC membrane elaboration

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Engineering Sciences [physics] Micro and nanotechnologies/Microelectronics

Jean-François Michaud  : Connect in order to contact the contributor

https://hal-univ-tours.archives-ouvertes.fr/hal-01741555

Submitted on : Friday, March 23, 2018-11:24:33 AM

Last modification on : Thursday, August 4, 2022-5:05:48 PM

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hal-01741555 , version 1 (23-03-2018)

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Jean-François Michaud, Rami Khazaka, M. Portail, G. Andrä, J. Bergmann, et al.. Laser irradiation influence on Si/3C-SiC/Si heterostructures for subsequent 3C-SiC membrane elaboration. Conférence MRS Spring Meeting, Apr 2016, Phoenix, United States. pp.3649 - 3654, ⟨10.1557/adv.2016.327⟩. ⟨hal-01741555⟩

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