Skip to Main content Skip to Navigation
Conference papers

Laser irradiation influence on Si/3C-SiC/Si heterostructures for subsequent 3C-SiC membrane elaboration

Complete list of metadata

https://hal-univ-tours.archives-ouvertes.fr/hal-01741555
Contributor : Jean-Francois Michaud <>
Submitted on : Friday, March 23, 2018 - 11:24:33 AM
Last modification on : Saturday, November 7, 2020 - 4:00:03 PM

Identifiers

Citation

Jean-François Michaud, Rami Khazaka, M. Portail, G. Andrä, J. Bergmann, et al.. Laser irradiation influence on Si/3C-SiC/Si heterostructures for subsequent 3C-SiC membrane elaboration. Conférence MRS Spring Meeting, Apr 2016, Phoenix, United States. pp.3649 - 3654, ⟨10.1557/adv.2016.327⟩. ⟨hal-01741555⟩

Share

Metrics

Record views

132