Laser irradiation influence on Si/3C-SiC/Si heterostructures for subsequent 3C-SiC membrane elaboration

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https://hal-univ-tours.archives-ouvertes.fr/hal-01741555
Contributor : Jean-Francois Michaud <>
Submitted on : Friday, March 23, 2018 - 11:24:33 AM
Last modification on : Tuesday, November 19, 2019 - 4:48:06 PM

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Jean-François Michaud, R. Khazaka, M. Portail, G. Andrä, J. Bergmann, et al.. Laser irradiation influence on Si/3C-SiC/Si heterostructures for subsequent 3C-SiC membrane elaboration. Conférence MRS Spring Meeting, Apr 2016, Phoenix, United States. pp.3649 - 3654, ⟨10.1557/adv.2016.327⟩. ⟨hal-01741555⟩

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