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Laser irradiation influence on Si/3C-SiC/Si heterostructures for subsequent 3C-SiC membrane elaboration

Jean-François Michaud 1 Rami Khazaka 1, 2 M. Portail 2 G. Andrä 3 J. Bergmann 3 D. Alquier 1 
1 GREMAN - UMR 7347 - GREMAN (matériaux, microélectronique, acoustique et nanotechnologies)
2 CRHEA - Centre de recherche sur l'hétéroepitaxie et ses applications
3 IPH - Institut für Physikalische Hochtechnologie
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https://hal-univ-tours.archives-ouvertes.fr/hal-01741555
Contributor : Jean-François Michaud Connect in order to contact the contributor
Submitted on : Friday, March 23, 2018 - 11:24:33 AM
Last modification on : Thursday, August 4, 2022 - 5:05:48 PM

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UNIV-TOURS | CNRS | UNIV-COTEDAZUR | GREMAN | INSA-GROUPE | INSA-CVL | CRHEA

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Jean-François Michaud, Rami Khazaka, M. Portail, G. Andrä, J. Bergmann, et al.. Laser irradiation influence on Si/3C-SiC/Si heterostructures for subsequent 3C-SiC membrane elaboration. Conférence MRS Spring Meeting, Apr 2016, Phoenix, United States. pp.3649 - 3654, ⟨10.1557/adv.2016.327⟩. ⟨hal-01741555⟩

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