Laser irradiation influence on Si/3C-SiC/Si heterostructures for subsequent 3C-SiC membrane elaboration - Archive ouverte HAL Access content directly
Conference Papers Year : 2016

Laser irradiation influence on Si/3C-SiC/Si heterostructures for subsequent 3C-SiC membrane elaboration

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hal-01741555 , version 1 (23-03-2018)

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Jean-François Michaud, Rami Khazaka, M. Portail, G. Andrä, J. Bergmann, et al.. Laser irradiation influence on Si/3C-SiC/Si heterostructures for subsequent 3C-SiC membrane elaboration. Conférence MRS Spring Meeting, Apr 2016, Phoenix, United States. pp.3649 - 3654, ⟨10.1557/adv.2016.327⟩. ⟨hal-01741555⟩
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